Keithley 6517B Manual

Keithley Multimeter 6517B

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Side 1/6

A Tektronix Company

LOW LEVEL MEASURE & SOURCE

• Measures resistances up to 1018Ω

• 10aA (10×10–18A) current

measurement resolution

• <3fA input bias current

• 6½-digit high accuracy

measurement mode

• <20µV burden voltage on the

lowest current ranges

• Voltage measurements up to 200V

with >200TΩ input impedance

• Built-in ±1000V voltage source

• Unique alternating polarity voltage

sourcing and measurement

method for high resistance

measurements

• Built-in test sequences for four

different device characterization

tests, surface and volume

resistivity, surface insulation

resistance, and voltage sweeping

• Optional plug-in scanner cards for

testing up to 10 devices or material

samples with one test setup

APPLICATIONS

• Polymer electrical characterization

• Beam measurements

• Dosimetry

• Device leakage current

measurements

• Insulation resistance

measurements

• Optoelectronic detector

characterization

• Volume and surface resistivity

• Nanomaterial characterization

The Keithley 6517B Electrometer/High Resistance Meter is

the worldwide research laboratory standard for sensitive

measurements. With over 60 years of low level measurement

expertise, Keithley electrometers provide reliable measure-

ments of current levels down to 10aA (10×10

–18A,) charge

levels down to 1fC, and the highest resistance measurements

available up to 10

18Ω. The 6517B is also capable of meas-

uring the largest voltage range—up to 200V—with an input

impedance exceeding 200TΩ.

Exceptional Performance Specifications

The 6517B has incorporated Keithley’s decades of expertise

in low level measurement technology into an innovative, low

current input amplifier with an input bias current of <3fA,

just 0.75fAp-p noise, and <20µA burden voltage on the low-

est current ranges. The voltage circuit input impedance is greater than 200TΩ for near-ideal circuit

loading. These specifications ensure the accuracy and sensitivity needed for accurate low current and

high imped ance volt age, resistance, and charge measure ments in areas of re search such as physics,

optics, nanotechnology, and materials science. A built-in ±1kV voltage source with sweep capability

simplifies performing leak age, break down, and resis tance testing, as well as volume (Ω-cm) and sur-

face resistivity (Ω/square) mea sure ments on insulating materials.

Wide Measurement Ranges

The 6517B offers autoranging over the full span of ranges on current, resistance, voltage, and charge

measurements. The 6517B combines the following measurement capabilities:

• Ultra-sensitive ammeter with current measurement from 10aA to 20mA

• Highest impedance voltmeter with voltage measurement from 1µV to 200V

• Ultra-high range ohmmeter with resistance measurement from 1 to 10Ω18Ω

• Sensitive coulombmeter with charge measurement from 1fC to 2µC

Improved High Resistivity Measurements

Many test applications require measuring high levels of resistivity (surface or volume) of materials.

The conventional method of making these measurements is to apply a sufficiently large voltage to

a sample, measure the current that flows through the sample, then calculate the resistance using

Ohm’s Law (R=V/I.) While high resistance materials and devices produce very small currents that are

difficult to measure accurately, Keithley electrometers and picoammeters are used successfully for

such measurements.

Even with high quality instrumentation, inherent background currents in the material can make

these measurements difficult to perform accurately. Insulating materials, polymers, and plastics typ-

ically exhibit background currents due to piezoelectric effects, capacitive elements charged by static

electricity, and polarization effects. These background currents are often equal to or greater than

the current stimulated by the applied voltage. In these cases, the result is often unstable, providing

inaccurate resistance or resistivity readings or even erroneous negative values. Keithley’s 6517B is

designed to solve these problems and provides consistent, repeatable, and accurate measurements

for a wide variety of materials and components, especially when used in combination with the 8009

Resistivity Test Fixture.

Alternating Polarity Method for High Resistance Measurements

The 6517B uses the Alternating Polarity Method, which virtually eliminates the effect of any back-

ground currents in the sample. First and second order drifts of the background currents are also can-

celed out. The Alternating Polarity Method applies a voltage of positive polarity, then the current is

measured after a specified delay (Measure Time). Next, the polarity is reversed and the current meas-

ured again, using the same delay. This process is repeated continuously, and the resistance is calculat-

ed based on a weighted average of the four most recent current measurements. This method typically

produces a highly repeatable, accurate measurement of resistance (or resistivity) by the seventh rever-

6517B

Electrometer/High Resistance Meter

6517B Electrometer/High Resistance Meter

Test Equipment Depot - 800.517.8 - 99 Washington Street Melrose, - TestEquipmentDepot.com431 MA 02176

A Tektronix Company

LOW LEVEL MEASURE & SOURCE

6517B

Electrometer/High Resistance Meter

sal on most materials (i.e., by discarding the first three readings.) For example, a 1mm-thick sample

of 1014Ω-cm material can be measured with 0.3% repeatability in the 8009 Test Fixture, provided the

background current changes less than 200fA over a 15-second period.

Simple DMM-like Operation

The 6517B is designed for easy, DMM-like operation via the front panel, with single-button control of

im por tant functions such as resistance measurement. Also, all the functions of the 6517B can be pro-

grammed through either the RS-232 interface or the GPIB (IEEE-488) interface.

High Accuracy High Resistance Measurements

The 6517B offers a number of features and capabili ties that help ensure the accuracy of high

resistance mea sure ment applications. For example, the built-in volt age source simplifies determining

the relation ship between an insulator’s resistivity and the level of source voltage used. It is well-

suit ed for capacitor leakage and insulation resistance mea sure ments, tests of the surface insulation

resis tance of printed circuit boards, voltage coefficient test ing of resistors, and diode leakage

characterization.

Temperature and Humidity Stamping

Humidity and temperature can influence the resist ivity values of materials significantly. To help you

make ac curate comparisons of readings acquired un der varying conditions, the 6517B offers a built-

in type K thermo couple and an optional 6517-RH Relative Humidity Probe. A built-in 50,000 reading

data storage buffer allows recording and recalling measurements stamped with the time of the meas-

urement, the temperature, and the relative humidity.

Ordering Information

6517B Electrometer/High

Resistance Meter

Accessories Supplied

237-ALG-2 Low Noise Triax Cable,

3-slot Triax to Alligator Clips,

2m (6.6 ft)

8607 Safety High Voltage

Dual Test Leads

6517-TP Thermocouple Bead Probe

CS-1305 Interlock Connector

Current (pA)

Current

Stored Current

Measurement

Sample’s

Background Current

Voltage Source

–1

–V

The alternating voltage source polarity method eliminates the effects of background currents

in materials for making repeatable, accurate high resistance and resistivity measurements.

6517B Electrometer/High Resistance Meter

Produkt Specifikationer

Mærke:	Keithley
Kategori:	Multimeter
Model:	6517B

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